发明名称 |
MINUTE PARTICLE FLOW CONTROL APPARATUS |
摘要 |
PURPOSE:To facilitate the control of the supply amount of minute particles by providing a reservoir for supplying minute particles to a passage on the upstream side of a shrinkage/expansion nozzle and supplying the minute particles under the control of a valve. CONSTITUTION:A shrinkage/expansion nozzle 1 in which a passage is gradually shrinked from an inlet 1a toward a throat 2 and gradually expanded therefrom toward an outlet 1b is provided between an upstream chamber 3 and a downstream situated chamber 4. A reservoir 25 for supplying minute particles 27 to a passage is provided on the upstream side of the shrinkage/expansion nozzle 1. The minute particles are supplied under the control of a valve 26. This construction facilitates the control of supply amount of the minute particles.
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申请公布号 |
JPS61218813(A) |
申请公布日期 |
1986.09.29 |
申请号 |
JP19850115364 |
申请日期 |
1985.05.30 |
申请人 |
CANON INC |
发明人 |
CHIBA YUJI;ANDO KENJI;MASAKI TATSUO;SUGATA MASAO;OSABE KUNIJI;KAMIYA OSAMU |
分类号 |
C23C14/22;B01J8/00;B01J19/00;B01J19/26;B05C19/00;B22F1/00;C23C14/54;F15D1/02;F15D1/08 |
主分类号 |
C23C14/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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