| 摘要 |
PURPOSE:To facilitate the inspection, by forming a resistance film to connect one electrode group of all photosensor elements arranged on a substrate while with a voltage applied thereacross, a measuring terminal is formed to short- circuit several electrodes of the other group thereof. CONSTITUTION:A resistance film 5 is formed on the same surface of a photosensor array forming substrate comprising photodiodes or the like. One end of a resistance film 5 long sideways serves as earth terminal 6 and a voltage V0 for detection of potential is applied to the end of the film 8 opposite to the earth end 6. One electrode of a photosensor 2 arranged in an array is formed by connecting separate leads 10. In addition, the other electrode (for example, negative) of the photosensor 2 is made up of metal bar blocks equivalent to terminal short circuit length formed with respect to respective negative terminals 3, three per terminal as blocks for inspection and the potential of the block 9 is measured. When any element is short-circuited in the photosensor 2 on which the block 9 is abutted, earth potential corresponding to the position of the array is detected with the block 9 thereby enabling the detection of the photosensor 2 suffering short-circuiting.
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