发明名称 LINE WIDTH MEASURING DEVICE
摘要 PURPOSE:To shorten a measuring time and eliminate scattering of the accuracy of measurement by composing an O/E conversion means of an one-dimensional image sensor array and attaching a means to convert a parallel output signal from this sensor array to a time series signal. CONSTITUTION:When a signal processing means 20 is started by operating its key 8a, each element of a one-dimensional image sensor array 13 accumulates a light quantity of a projected image for an integral time (t) at the same time. Next, an image elemental information K is memorized in an image elemental information memory section 22a through a parallel/series conversion circuit 17 and an AD convertor 18. This information K is made to come near a true value by an image elemental information corrective means 24 and is averaged to a smooth signal level by an averaging means 25 and then an edge point is detected by an edge detective means 26. Based on the location of the edge point, a line thickness is calculated at a line width calculating means 27 and its result is displayed at an output device 9a.
申请公布号 JPS61217704(A) 申请公布日期 1986.09.27
申请号 JP19850059161 申请日期 1985.03.22
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 YOSHIKAWA ATSUSHI;KONDO NORIYUKI;TAMADA ATSUSHI
分类号 G01B9/04;G01B11/02 主分类号 G01B9/04
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