| 摘要 |
PURPOSE:To calculate the voltage applied to an internal conductive member by measuring the secondary electrons obtained by emitting an electron beam directly to the member from above an insulating film, and processing a signal. CONSTITUTION:A high voltage charged electron beam l1 is emitted from a strobe controller 3 periodically in the prescribed pulse width to an object 1 to be inspected and mounted in a vessel 2. Those of the secondary electrons l2 emitted from the object 1, having the prescribed energy components are passed through a deceleration electric field energy analyzer 4. The secondary electron detector 5 detects the electrons l2, and outputs as an electric signal. The detection signal is supplied through an A/D converter 6 and a signal processor 7 to a calculation controller 8. The processor 7 calculates the time constant of an insulating member of an object to be inspected on the basis of a signal v0 of discrete value by the converter 6, and calculates the voltage applied to the inspector in the object to be inspected and recovered on the basis of the time constant. |
