| 摘要 |
PURPOSE:To expand displacement while reducing the size of an optical deflecting device, and to prevent light from being attenuated as much as possible by reflecting light specific times between a movable mirror and a fixed mirror. CONSTITUTION:When the tip of the stylus 4 of the movable mirror 1 is brought into contact with the surface of a body to be detected, the displacement of the object body is transmitted to the movable mirror 1 through the stylus 4 and the movable mirror 1 is turned and displaced by an angle theta, for example, from a horizontal state as shown by an arrow 3. Laser beam 9 incident on the reflecting surface 1a of the movable mirror 1 to travels to the reflecting surface 5a of the mixed mirror 5, further reflected by the reflecting surface 5a to travel to the reflecting surface 1a, and reflected similarly and repeated; and the beam is reflected, for example, four times by the reflecting surface 1a and three times by the reflecting surface 5a, i.e. seven times in total and the 7th reflected laser beam is photodetected by the photodetection surface 10a of a semiconductor position detecting element 10. Then, the laser beam 9 is deflected to one side part 1d every time it is reflected repeatedly between the movable mirror 1 and fixed mirror 5.
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