Infrared microscope

摘要

In an infrared microscope for inspecting wafers, laterally correct images of the circuit can be obtained even given an inverted wafer either if it is ensured that a transition from an even number of optical deflections to an odd number of optical deflections can be made in the beam path from the microscope objective to the converter, or if a polarity reversal of the beam deflecting directions of the image tube is provided for an infrared camera.