| 摘要 |
PURPOSE:To detect the thickness control and the coating irregularity of a member to be inspected at the on-line by arranging the member to be inspected between the light emitting means and the photodetecting means and detecting a transmitting quantity of the energy line. CONSTITUTION:The energy line radiated by a light emitting means 4 is projected through an optical fiber bundle 2 to a member 1 to be inspected, and the energy line transmitted through a member 1 is photodetected by an optical fiber bundle 3. The energy line, which transmits the member 1 and is photodetected by an optical fiber bundle 3, is guided through the optical fiber bundle 3 to a photodetecting means 5, and the transmitting quantity of the energy line is detected by a means 5. The transmitting ratio is calculated from the detected photodetecting quantity and the projecting light quantity, and the film thickness of the member 1 can be known from the relation of the transmitting ratio and the film thickness. Thus, the thickness control of the member 1 can be executed without damaging the member 1 and cutting it. |
