| 摘要 |
PURPOSE:To simplify structure, by a method wherein the moving vane of a molecular pump or disc, mounted to the moving vane, and rotary shaft are coupled to each other by welding being excellent in sealing ability. CONSTITUTION:In a molecular pump, a disc 5 in a casing 1 is mounted to a moving vane 3 or the two members are integrally machine. A rotary shaft 5 is engaged with a disc 4, and the upper surface C part and the lower surface D part are integrally formed to each other by welding, e.g., electron beam welding or laser welding, having excellent sealing ability. This eliminates securing of a cover, having a packing of a disc, by means of plural bolts, as in a conventional pump, in order to prevent the occurrence of leak from the suction port side to the exhaust port side, resulting in simplification of structure.
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