| 摘要 |
PURPOSE:To suppress the vibration except the scanning direction of a lens by increasing the rigidity of the titled device in the direction except the scanning direction of the lens by the action of a lens supporting member, an elastic member and an elastic variable means and making smaller the exciting force. CONSTITUTION:The scanning device has a lens 1, a holder 6, a supporting rod 7 and a pair of crosses and is composed of a plate spring 8 having high rigidity in the direction (Z direction) except the scanning direction (X direction) of the lens 1, a plate spring 9 provided to a frame 12, a piezoelectric actuator 10 with high rigidity provided between the plate spring 9 and the frame 12, an actuator 11 scanning, etc. When the impressing voltage of the actuator 11 for scanning and the piezoelectric actuator 10 is changed, the plate spring 9 is displaced, and the displacement of the Z direction of the plate spring 9 is controlled by the displacement of the piezoelectric actuator 10. Thus, even when the scanning scope goes to be wide, it is not necessary to enlarge the exciting force, and the vibration except the scanning direction of the lens 1 when the lens is scanned in the X direction goes to very small.
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