| 摘要 |
PURPOSE:To produce a good image near the outlet of an energy analyzer by reducing aberration by installing elements for secondarily receiving and amplifying charged particles and for discharging the amplified particles parallel to each other near the inlet and installing a detection system for producing an image of the particles discharged through outlet elements near the outlet. CONSTITUTION:A laminar electric field is produced at the inlet 2 of a semispherical energy analyzer 6 by imaging charged electrons, produced by irradiating characteristic X-rays 20 upon a sample 18, upon a multichannel plate 8 by means of a lens system 22; a mesh electrode 10 is installed between the inlet 2 and the plate 8. Thus amplified particles traveling parallel to each other are made vertically incident upon the surface of the inlet 2 through a slit 24 located at the inlet 2. After passing through a slit 26 installed at the outlet 4 of the analyzer 6, the particles pass through a multichannel plate 12 prior to being made vertically incident upon a fluorescent plate 14 in the detection system. The image formed on the fluorescent plate 14 is displayed on a vidicon 16. Due to the above structure, aberration is prevented from appearing at the inlet 4 even when charged particles are made incident upon the inlet 4 with an angle of alpha, thereby producing a perfect particle image. |
