| 发明名称 |
PROCESS FOR MAKING HOLES WITH SMALL DIMENSIONS, USE OF THIS PROCESS IN MAKING FIELD-EFFECT TRANSISTORS WITH A SELF-ALIGNED SUB-MICRON GATE, AND TRANSISTORS MADE BY THAT PROCESS |
| 摘要 |
|
| 申请公布号 |
EP0104686(B1) |
申请公布日期 |
1986.09.24 |
| 申请号 |
EP19830201243 |
申请日期 |
1983.08.31 |
| 申请人 |
LABORATOIRES D'ELECTRONIQUE ET DE PHYSIQUE APPLIQUEE L.E.P.;N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
MEIGNANT, DIDIER SERGE |
| 分类号 |
H01L29/812;H01L21/027;H01L21/28;H01L21/302;H01L21/306;H01L21/3065;H01L21/308;H01L21/338;H01L29/417;H01L29/80;(IPC1-7):H01L21/28;G03F7/02 |
主分类号 |
H01L29/812 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
