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发明名称
METHOD OF DETERMINING THE LAYER REMOVAL END-POINT DURING LAYERED SUBSTRATE DEVELOPMENT OR ETCHING, AND APPARATUS FOR CARRYING OUT THIS PROCESS
摘要
申请公布号
EP0084075(B1)
申请公布日期
1986.09.24
申请号
EP19820100373
申请日期
1982.01.20
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
HAFNER, BERNHARD;THIEL, KLAUS PETER;WENZ, GUIDO, F.;WUSTENHAGEN, JURGEN, F., DR.
分类号
C23F1/00;G01B11/06;G03F7/30;(IPC1-7):H01L21/66
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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