| 摘要 |
PURPOSE:To provide the titled apparatus giving a polymer having uniform thickness, and composed of a plasma generator to convert monomer vapor to plasma, a movable plasma electrode placed to the outer circumference of the generator, a heater integrated with the electrode, a vacuum pump and a high-frequency power source. CONSTITUTION:The objective plasma polymerization apparatus is composed of a plasma generator 2 to convert a plasma-polymerizable monomer vapor in the generator to a plasma, a pair of plasma electrodes 3 placed outside of the generator and movable along the plasma generator 2 parallel to the flow of the monomer, and a heater 4 integrated with the plasma electrode 3. The hollow material 1 to be subjected to the plasma polymerization treatment, e.g. a resin pipe is placed in the plasma generator 2, and the heater 3 is electrified to evaporate water from the pipe. The plasma generator 2 is evacuated with the vacuum pump 14, a monomer is introduced into the generator 2 and a plasma is generated in the plasma generator 2 by the glow discharge generated by the high-frequency power source. The surface of the hollow material 1 is coated with the plasma-polymerized polymer film by this process. |
