摘要 |
PURPOSE:To enable correct measurement at all times even when wavelength for measuring is different by compensating temperature characteristic of spectral sensitivity. CONSTITUTION:Radiation energy light from an object 1 to be measured is converged by a lens 2 and stopped down by a slit 3 and made to parallel rays by a lens 4. Then, the light is spectroscopically separated by a spectroscope 5 and is made incident onto each element of a detector 7 as light of different wavelength. Gradient or function of the rate of variation of spectral sensitivity of measuring wavelength of each element of the detector 7 is stored beforehand in a memory 9. Temperature T of the detector 7 is detected by a temperature sensor 8 at the time of measuring, and output of each element of the detector 7 is calculated and corrected by an arithmetic unit 10 basing on gradient or function of each element of the memory 9 and temperature T of the sensor 8. Thus, sufficient temperature compensation is possible even wavelength for measurement is different, and correct measuring can be made at all times. |