| 摘要 |
PURPOSE:To subject a belt-like body to a vacuum treatment without damaging and deforming said body by providing auxiliary vacuum chambers adjacently to both sides of a vacuum treatment chamber for the belt-like body, providing respectively stockers in the treatment chamber and the auxiliary vacuum chambers and contg. successively the belt-like body through sealing devices into the stockers. CONSTITUTION:The belt-like body 39 delivered intermittently from a supply device 38 enters the stocker 26 of the vacuum treatment chamber 24 through the sealing device 30, the stocker 34 in the auxiliary vacuum chamber 28 and the sealing device 31. The inside of the chamber 28 is evacuated to a vacuum by a vacuum pump 36 in this stage. The belt-like body is supplied through such chamber into the chamber 24 and is vacuum-treated in the chamber 24; thereafter, the body is contained in the stocker 27. The treated body passes through the sealing device 32, the stocker 35 in the auxiliary vacuum chamber 29 and the sealing device 33 and is taken up on a take-up device 41 in the atmosphere. The generation of the damage in the sealing device for passing airtightly the body 39 and the elongation and deformation of the belt-like body by the excessive tension generated by friction in a sealing stage as in the conventional practice are thus obviated.
|
