| 摘要 |
PURPOSE:To form a reflection preventing film on the end face of an optical fiber in a vacuum state of high quality by connecting an auxiliary vacuum chamber to a vacuum chamber used for forming the reflection preventing film on each end face of bundled optical fibers and inserting bundled optical fibers into the vacuum chamber through the auxiliary vacuum chamber and forming the reflection preventing film on each end face of bundled optical fibers. CONSTITUTION:Bundled optical fibers 9 are set, and a cover of an auxiliary vacuum chamber 15 is closed, and an exhauster 2 and a subexhauster 14 are operated to evacuate a vacuum chamber 1 and the auxiliary vacuum chamber 15, and end faces of bundled optical fibers 9 are heated by a heater 7. When the degree of vacuum in the vacuum chamber 1 becomes <=5X10<-6>Torrs and end faces of optical fibers 9 become a prescribed temperature, vacuum deposition is started. The vacuum deposition for each end face of optical fibers 9 is performed by opening a shutter after a boat 3 is heated by power supply with the shutter 5 closed to fuse and gasify a deposition source 4 sufficiently. After the completion of the vacuum deposition, heating due to the heater 7 is stopped, and exhausting of the vacuum chamber 1 and the auxiliary vacuum chamber 15 is stopped, and air is restored in the vacuum chamber 1 and the auxiliary vacuum chamber 15 to form reflection preventing films. |
