| 摘要 |
<p>PURPOSE:To enable decision on the acceptance of a resistance value measuring device and the measurement of resistance value of a resistor automatically while making it possible during the trimming, by a method wherein a reference resistor is always mounted on a probe card and a measuring system for measuring the resistance of a trimming resistor is connected to either the reference resistor or the resistor by switching. CONSTITUTION:According to a command from a central control command section 22, a scanner 20 connects a resistance value measuring device 19 to either a reference resistor 18 or a resistor by switching, which ensure the detec tion of any possible trouble in the measuring device 19 at any time before the start of the trimming, during the trimming and after the trimming. Switching can be done between the decision on the acceptance of the measuring device 19 and the measurement of the resistance value of the resistor even during the trimming to prevent the poor trimming due to a trouble in the measuring device 19 thereby enabling reduction in the measuring time for the resistance value of the resistor.</p> |
