发明名称 FILM THICKNESS MEASURING METHOD FOR MAGNETIC DISC MEDIUM
摘要 PURPOSE:To enable a rapid and highly accurate measurement with a simple device by irradiating two or more laser beams of different frequencies and taking the nearest value from among the values of the strong portion in light- intensity of an interference beam produced by the reflecting beams for the correct film thickness. CONSTITUTION:To irradiate laser beam L1, L2 of different frequencies on a magnetic film 4 of a magnetic disc medium 1, lasers 51 and 52 generating laser beams of different frequencies are installed. The laser 51 is driven by a power source 61 and the laser 52 is driven by a power source 62 respectively. A reflected beam from a magnetic film to be measured 4 is detected by a photo- cell 7 and a measured value produced by a strong portion in light intensity is calculated by a computer. Out of the measured values of the respective strong portions in light-intensity, the closest value is taken as the correct film thickness. Therefore, the measuring work can be conducted easily and rapidly and the device can be simplified.
申请公布号 JPS61212705(A) 申请公布日期 1986.09.20
申请号 JP19850054058 申请日期 1985.03.18
申请人 FUJITSU LTD 发明人 OGASA KAZUO
分类号 G11B5/84;G01B11/06 主分类号 G11B5/84
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