| 摘要 |
PURPOSE:To obtain an electrical signal corresponding to the measured pressure, by providing first and second shearing gauges near the surface and near the center of the thickness of a semiconductor diaphragm respectively to compute the difference between the outputs of the first and second shearing gauges. CONSTITUTION:A first shearing gauge 3 is provided near the surface of a semiconductor diaphragm 2 while a second shearing gauge 4 near the center of thickness thereof 2. When a measured pressure Pm is applied on the diaphragm 2, a measuring stress is generated in the diaphragm 2. There is a residual stress in the diaphragm 2 as generated during the manufacture or the like. In this case, an electrical signal corresponding to the measured pressure Pm can be obtained by computing the difference between the outputs of the gauges 3 and 4. |
