| 摘要 |
PURPOSE:To improve the production yield of a thin-film magnetic head of double-layer spiral structure by setting the side wall angle of a layer of the 1st layer to 40-70 deg. and patterning photoresist which forms coil conductors of the 2nd and succeeding layers. CONSTITUTION:A lower magnetic layer 2 is formed of 'Sendust(R)' or amorphous material on a magnetic or nonmagnetic base plate and the 1st insulating layer 3 is formed of SiO2, etc., thereupon by sputtering and vapor deposition. Photoresist is applied further thereupon, and patterned by exposure and development. This resist is heat-treated to form hemispherical resist 10. This resist is used as a mask to form a coil conductor. In this case, the side wall angle of the coil of the 1st layer is set to 40-70 deg. and the angle of incidence of an ion beam is set to 30-40 deg. for ionmilling. Consequently, the 1st layer coil and the 2nd layer coil 6 are prevented from short-circuiting and the thin-filmmagnetic head of multi-layered spiral structure is productedat high yield.
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