| 摘要 |
PURPOSE:To enable size, shape and position of an injecting pupil to be measured simply and with high accuracy by a method wherein an optical transmission section lager than a pupil image by a pinhole and a light shielding layer possessing conforming position pattern in a luminous flux passing through another pinhole are provided. CONSTITUTION:Incident max. luminous flux injecting to pinholes 8, 9 and illuminating luminous flux form a pupil image A effective light source image B on a light shielding layer 5''. As a pinhole 10 larger than the pupil image A and a reference mark 11 exist is the light shielding layer 5'', the pupil image A by the incident max. luminous flux, the effective light source image B and a reference mark image 11' are formed to a photosensitive layer. When the pupil and the effective light source are baked, the relationchip of relative position between the effective light source and the pupil and area ratio are detected, if the relationship of relative position between the reference pattern image and the pupil, and the relationship of relative position beween the reference pattern image and the effective light source image are measured, because they use the same reference. Thereby, size, and the position of the injection pupil can be measured simply and with high accuracy. |
