发明名称 ELECTRON-OPTICAL APPARATUS COMPRISING PYROLYTIC GRAPHITE ELEMENTS
摘要 The electronic optical apparatus provided is such that the parts situated in the immediate vicinity of the beam, anode, screen placed inside the condenser block, screen formed from a tube and limiter diaphragms inside the deflection block, screen placed between the final focussing lens and the sample to be observed and the secondary electron collector electrode have their faces exposed to the electron beam formed from pyrolytic graphite.
申请公布号 DE3365188(D1) 申请公布日期 1986.09.18
申请号 DE19833365188 申请日期 1983.01.11
申请人 CAMECA 发明人 BOISSEL, PIERRE;TONG, MATHIAS
分类号 H01J37/16;G01Q30/02;G01Q30/18;H01J37/02;H01J37/26;(IPC1-7):H01J37/02;H01J37/09 主分类号 H01J37/16
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