| 摘要 |
PURPOSE:To minutely move a stage in the axial directions of longitudinal and lateral guides and in the rotating direction by independently operating each of driving devices and providing a minutely moving mechanism consisting of said driving devices and cocking mechanisms. CONSTITUTION:Independent control parts m1, m2, m3, m4 are connected to driving devices M1, M2, M3, M4 on the both ends of longitudinal and lateral movable guides 2, 3, and such driving devices M1, M2, M3, M4 and locking mechanisms 7 corresponding to them, constitute a minutely moving mechanism for stage 4. In order to minutely move a stage 4 after completing positioning by rough feeding, first,an intake air source is operated to make the adsorbing board 73 of the locking mechanism 7 to be adsorbed to a surface table 1 to fix the movable guide 2, 3. Then, when providing thrust to the movable guides M1, M2, an elastic member in the locking mechanism 7 is deformed, causing the movable guide 2 to move minutely by the amount of deformation of the elastic member, to minutely move the stage 4 in the axial direction of the guide 3. |
