| 摘要 |
PURPOSE:To control a discharge power so that a laser output becomes constant by inclusion of a detecting means which detects temperature of laser medium gas, a memory means which stores input characteristic data of laser beam and a processing means which outputs a control signal to a discharge power control means. CONSTITUTION:When a gas temperature T changes to T2 from T1 by continuation of laser oscillating operations, it is detected by a temperature sensor 32 and it is input to a CPU 36 through an A/D converter 34. The CPU 36 obtains a discharge input power Wd when a laser output is Wr3 and gas temperature is T2 from a table stored in the memory 38. Since Wd=Wd2, such command signal is output to a power control part 42 by the CPU 36, a power to be applied to a discharge tube 18 is changed to Wd2 and a laser output Wr is well controlled to Wr3. Thereby, laser output can be stabilized without requiring an expensive high precision gas temperature regulator and cooling apparatus. |
