摘要 |
PURPOSE:To attain to enhance accuracy, by bringing the gain determining resistor element provided to an output voltage amplifying circuit to a temp. compensating resistor element for correcting the non-linearity of the temp. characteristics of output voltage by the non-linearity of the resistance temp. characteristics of said gain determining resistor element. CONSTITUTION:An insulating film 3 is directly formed to the surface of a beam body 2 from a polyimide resin and a membrane strain gauge circuit 4 is formed to said insulating film 3 and a circuit board 6 having an output voltage amplifying circuit 5 is integrally attached to the beam body 2. Gain determining resistor elements Ra, Rb are connected to the output voltage amplifying circuit 5 and the resistor element Rb is constituted as a temp. compensating resistor element for correcting the non-linearity of the temp. characteristics of output voltage V0 by the non-linearity of the resistance temp. characteristics of said element Rb. By this method, the temp. characteristics of output voltage V0 are flattened and highly accurate measurement can be performed. |