| 摘要 |
PURPOSE:To inspect the heights of objects to be inspected accurately by correcting the moving amount between the objects to be inspected by a height error of a holding part of a jig and preventing from deviating of an optical beam irradiated from an optical beam generating means from the upper surfaces of the objects to be inspected. CONSTITUTION:A CPU confirms whether the jig 11 holding three objects 10 to be inspected is set at the jig holding position on a table 19. Reflected light of the optical beam reflected by the upper surface of the jig 11 is picked up by a camera 12 by moving the table 19 and the height of the upper surface of the jig 11 is calculated and the height error between each holding part 11(a) is calculated by inclination or the like of the jig 11 and stored. Then, the table 19 is moved by the prescribed moving amount so that the optical beam is irradiated on the prescribed positions of the upper surfaces of the objects 10 to be inspected and the reflected light is picked up by the camera 12 and the difference between both the reflected lights is calculated from coordinates of the upper surfaces of the upper parts 10(a) and the upper surfaces of the lower parts 10(b) of the objects 10 to be inspected and stored. The heights of the upper parts 10(a) of three objects 10 to be inspected are calculated respectively by repeating the operation and decision is made from the difference with the standard data respectively. |
