| 发明名称 |
Method and apparatus for throttling gas flow to a cryopump |
| 摘要 |
Orifices in a cooled plate throttle gases entering a cryopump. Selected orifices are closed by removable closures such as spring clips to allow the throttling to be varied.
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| 申请公布号 |
US4611467(A) |
申请公布日期 |
1986.09.16 |
| 申请号 |
US19850742885 |
申请日期 |
1985.06.10 |
| 申请人 |
HELIX TECHNOLOGY CORPORATION |
发明人 |
PETERSON, JOHN F. |
| 分类号 |
F04B37/08;(IPC1-7):B01D8/00 |
主分类号 |
F04B37/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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