| 摘要 |
PURPOSE:To carry out a plasma treatment with excellent operating efficiency in a short time by a simple batch change-over operation, by passing a sheet through a delivery chamber, a plasma treating chamber and a wind-up chamber which are connected to each other detachably and airtightly. CONSTITUTION:A sheet 24 is fixed to the sheet delivery machine 1c of a sheet delivery chamber 1a and introduced into a plasma treating chamber 5 which is connected to said chamber detachably and airtightly and is kept at a predetermined degree of vacuum through an exhaust pipe 17, while keeping the chamber 5 under an airtight condition by airtight on-off devices 4a, 4c. The sheet is then guided along the outer periphery of a rotatable drum type negative electrode 7 and voltage is applied to a plurality of positive electrodes 6 opposed to said electrode 7 to thereby generate plasma, thus treating the sheet with plasma. The sheet is then wound up by a sheet wind-up machine 1e in a sheet wind-up chamber 1b connected to said chamber 5 detachably and airtightly through a second connecting chamber 2b, while keeping the chamber under airtight conditions by airtight on-off devices 4d, 4b. After the completion of the plasma treatment, air is introduced into each chamber and the treated sheet is taken out of the wind-up chamber 1b to complete one batch treatment. |
