发明名称 PRODUCTION OF CIRCUIT BOARD
摘要 PURPOSE:To prevent the generation of a harmful gas and to produce quickly a circuit board by forming an etching resist pattern on a copper layer provided on a substrate and etching the same with sulfuric acid bubbles formed by incorporating gaseous oxygen into a sulfuric acid soln. CONSTITUTION:The layer of copper is formed by plating or adhesion on the substrate 1. The etching resist is them formed to the desired pattern on the above-mentioned copper layer. The substrate 1 provided with the resulted etching resist pattern is dipped in the sulfuric acid 3 and gaseous oxygen is blown into the liquid 3 to form the sulfuric acid bubbles 2. The etching is executed by the sulfuric acid bubbles 2. The formation of the circuit board at a high etching rate is thus made possible and the treatment of the waste liquid is made possible without generating the harmful gas and with less adverse influence of the residual ions.
申请公布号 JPS61207584(A) 申请公布日期 1986.09.13
申请号 JP19850047647 申请日期 1985.03.11
申请人 SUMITOMO ELECTRIC IND LTD 发明人 TANAKA MASATOSHI;MURAKAMI KAZUHITO
分类号 C23F1/00;C23F1/18;H05K3/06 主分类号 C23F1/00
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