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发明名称
METALLIZATION FOR SILICON NITRIDE MATERIAL
摘要
申请公布号
JPS61205688(A)
申请公布日期
1986.09.11
申请号
JP19850046432
申请日期
1985.03.11
申请人
TOSHIBA CORP
发明人
NAKABASHI MASAKO;TAKEDA HIROMITSU;SHIROKANE MAKOTO
分类号
C04B41/88;C04B37/02
主分类号
C04B41/88
代理机构
代理人
主权项
地址
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