| 摘要 |
PURPOSE:To pulsate the output by a small-capacity pulse power source, by limiting a discharge region, which is the object of pulse control, to one place, so that the capacity is smaller than the case where the total discharge region is made to be the object of control. CONSTITUTION:An output mirror 4 and a total reflection mirror 5 are attached to both ends of three discharge tubes 1, 2 and 3. Each discharge tube has anodes 6, 7 and 8 and cathode 9, 10 and 10 at both ends. Power is supplied steadily to the discharge tubes 1 and 2 from a DC power source 12, and discharge is generated in the inside. However, the tubes are adjusted so that are not oscillated by the discharge only in the two discharge tubes. Power is supplied to the discharge tube 3 from a pulse power source 13, and the discharge is pulsated. When the discharge tube 3 is discharged, all the discharge tubes 1, 2 and 3 are discharged, and oscillation is generated. When the discharge in the discharge tube 3 is stopped, the oscillation is not generated only by the remaining two discharge tubes. Therefore, the laser output can be pulsated by controlling only the discharge tube 3 by pulses. |
