| 摘要 |
PURPOSE:To enhance the resolution of a picture without decreasing fluctuation efficiency of incident light, by laminating photoelectric conversion layers, which absorb the incident light selectively in different characteristics, in three stages, and arranging a scanning circuit in each stage. CONSTITUTION:On a substrate 10 comprising a light transmitting material, an insulating layer 11 comprising macromolecular insulating material and the like is evaporated. A gate electrode 12 is evaporated thereon. A gate oxide film 13 is evaporated thereon to a thickness of about 1mum. An amorphous silicon layer 14 is evaporated thereon by about 0.2mum. Then, an N<+> type amorphous silicon film (source and drain) 15 is evaporated by about 0.2mum. Thereafter, ITO and the like as a lower transparent electrode 16 are evaporated. A photoelectric conversion layer 18R, which i evaporated thereon, selectively absorbs red light (a). An insulating material 19 for preventing cross talk between picture elements is filled between the neighboring photoelectric conversion layers 18R. An upper transparent electrode 20 is arranged on the insulating material 19 and the photoelectric conversion layer 18R. By repeating these manufacturing processes, photoelectric conversions layers 18G and 18B, which selectively absorb green light (b) and blue light (c), are formed. |
