| 摘要 |
PURPOSE:To detect and correct a fault without applying any pressure to fluid by fitting an electrostrictive element to the pressure sensitive strain inducing part of a pressure sensor by embedding, adhering, etc. CONSTITUTION:The semiconductor pressure sensor 3 is provided between the process pressure receiving diaphragm 5 and external pressure receiving diaphragm 6 of a pressure transmitter and outputs an electrical signal corresponding to strain based upon the difference between atmospheric pressure and process pressure through the diaphragms 5 and 6. The electrostrictive element 19 made of, for example, gallium arsenic is embedded in the pressure sensing part 16 of the pressure sensor 3. Therefore, the relation between an electric field applied to the electrostrictive element 19 and the strain induced at the pressure sensing part is known previously and then a fault is detected and corrected without impressing any fluid pressure through another piping in case of the fault. |
