| 摘要 |
PURPOSE:To form a stable film having less granular defects by using an evaporating source material formed by mixing a binder material consisting of a carbon compd. with a raw material consisting of an oxide and metal and molding the mixture under pressure to form a thin film in a vacuum. CONSTITUTION:The molding structure varies with the mutual grain size and viscosity in the case of molding the mixture under the pressure. The solidifying characteristic is required to be improved. The carbon compd. is added together with a solvent thereof to the mixture and is mixed therewith for the above-mentioned purpose. The mixture can be provided with the viscosity to withstand the pressure molding by the effect of such carbon compd. The provision of the function to assist partly the reduction of the oxide to the mixture is made possible by selecting said material to the carbon compd. The molding can be constituted of the base material oxide 1, metallic particles 2 and binder additive material 3. Such pressure molding is subjected to a heating treated in an inert gaseous atmosphere, by which the unnecessary carbon compd. can be decomposed and removed. Such heat-treated molding is heated in a vacuum, by which the formation of the stable film deposited by evaporation in a manner as to suppress the generation of the granular defect is made possible.
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