| 摘要 |
PURPOSE:To improve the quality of a sensitive body by vapor-depositing a photosensitive layer on an electrically conductive substrate put in a vacuum tank, vaporizing slowly a liq. in the vacuum tank to raise the internal pressure to a value close to atmospheric pressure, and taking out the substrate having the vapor-deposited photosensitive layer. CONSTITUTION:A double-walled liq. vessel 2 is placed in a vacuum tank 1, a valve 6 is shut, and vapor deposition is carried out. After or immediately before the end of the vapor deposition, a valve 11 is opened to introduce a liq. whose b.p. is below ordinary temp. into a liq. reservoir 7 from a liq. duct 8. Since the internal pressure of the reservoir 7 rises by the vaporization of the introduced liq. until the reservoir 7 is cooled, the generated gas is released from a gas releasing pipe 9 by opening a pressure control valve 12. After the liq. is introduced into the reservoir 7 by the required amount, the valve 11 is shut and the valve 6 is slowly opened. The liq. flowing in the liq. vessel 2 vaporizes at once, but the rate of vaporization is restricted because the wall of the vessel 2 absorbs the heat of vaporization, so the liq. gathers in the vessel 2. Thus, residue on the evaporation of starting materials can be prevented from scattering and depositing on the surface of the resulting sensitive body, and the quality of the sensitive body can be improved. |
