| 摘要 |
PURPOSE:To obtain the title filter having excellent compaction resistance and capable of being used under high pressure by forming the plasma-polymerized film of an organosiloxane compd. shown by the specified formula in a hydrophilic porous membrane. CONSTITUTION:A hydrophilic porous membrane of cellulose acetate, etc., is used as a substrate, which is placed on the lower electrode cooled by a refriger ant in a reactor. A gaseous organosiloxane monomer such as hexa methylcyclotrisiloxane shown by the formula is introduced between electrodes in a reactor which is kept at reduced pressure. A high-frequency wave is im pressed between the electrodes to generate low-temp. plasma and a plasma- polymerized film is formed on the porous membrane. In this case, the pore diameter of the porous membrane, the polymerization rate and the flow condi tion of the plasma are appropriately combined to form the plasma-polymerized film on the surface and at the inside of the porous membrane. Consequently, the creep property and hydrophilicity of the filter material are eliminated and a filter having excellent resistance can be obtained.
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