| 摘要 |
PURPOSE:To prevent hindrance against observation of transmitted scanning electron image by constructing such that means for detecting the diffraction image is arranged between a projection lens and a fluorescent board while making movable from the position where the electron beam will pass. CONSTITUTION:The electron beam 1 is deflected through a beam locking coil 2 to lock to one point on the surface of a specimen 17 through the front field 3 of an objective lens 4. A diffraction image is made on the rear focus face of the objective lens 4 then passed through an iris 5, an intermediate lens 6 and a projection lens 7 to project onto a fluorescent board 8. Here, a diffraction image detector 9 is positioned between the projection lens 7 and the fluorescent board 8 while made movable through projection/retraction against the electron beam path. Consequently, it is not required to bore the fluorescent board 8 nor to hinder observation of transmitted scanning electron image thus to enable fixing of the detector 9 and to improve handling.
|
