| 摘要 |
PURPOSE:To eliminate any obstable in the operation of a precision moving device caused by the change of an environmental temperature by employing a guide member or a rotor composed of ceramics having a smooth metal film in a direct or rotational type precision moving device. CONSTITUTION:A linearly movable member is constructed by tightening a fluid injection pad 3, a fluid injection pad fitting plate 5 and a top plate 6 with screws. A fluid injected from the fluid injection pad 3 floats the movable member so that the member moves along a guide member 4. The guide member 4 is composed of a square shaped column 101 of ceramics the surface of which is roughly processed, covered by a metal film 102 of a metal selected fro Fe, Cu, Ni and the like by vacuum evaporation or plating, and then finished by polishing. Likewise, a rotor forms a metal film 202 thereon after having been roughly processed and then is processed for finishing. A device employing this ceramic material is not subjected to an obstable in the operation by an effect caused by the change of an environmental temperature. |
