| 摘要 |
PURPOSE:To prevent a product from adhering to the lapping face by making air injection ports at the surface plate side over the entire lapping face of surface plate contacting against a product held in product fitting hole of carrier. CONSTITUTION:An opening 14 is communicated through a through-hole 15 in lower grinding wheel 6 to the through-hole 16 of lower surface plate while furthermore connected through a valve to an air supply source thus to eject the air through the opening 14 at proper time. Similar holes are made through the upper grinding wheel 8 and the upper surface plate. Consequently, the air is ejected through the opening 14 at the upper surface plate side prior to opening of upper surface plate while to open the upper surface plate upon bringing into such condition where the product 4 will never adhere to the upper surface plate. Consequently, the product is prevented from adhering to the upper surface plate to be lifted and dropped in the way. Then the air is ejected from the lower surface plate 6 side to release adhesion of product and to take out the product. |
