| 摘要 |
PURPOSE:To facilitate the adjustment for bringing the mode center or the output center of a laser beam in accordance with the center of an optical system by arranging a laser beam detector which can enter freely in the center of an optical path of the optical system. CONSTITUTION:Between a rear mirror 35 and a mirror assembled body 15 of a laser oscillator 3, a laser beam detector 37 is so arranged that it can be detached freely from lateral direction. The center 43 of the laser beam detector 37 is located in the center of an optical system such as lens and a lens tube across an optical axis 41 of laser beam BL. The laser beam detector 37 is composed of the segment sensors 45 of totally 96 pieces, for example, formed by dividing radially the concentric circles of 12 steps with equal intervals into equivalent 8 pieces. The conductors 47 are connected to a computer 49. By controlling the computer 49, the amplified output from an AMP allows a drive servo motor VM to actuate the rear mirror 35 for changing an irradiation angle of laser beam LB, thereby adjusting automatically so that the segment sensors 45 detect the laser beam LB uniformly. |
