| 摘要 |
A high average power, high repetition rate pulsed gas transport laser system is disclosed. A pulse forming network location for minimizing electrical discharge loop inductance is provided. RFI shielding is included as a result of containment of the pulse forming network housed in a dielectric structure eccentrically mounted within a pressurizable vessel and forming a portion of a high-speed gas flow loop. The gas recirculating blower motor is mounted external to the pressurizable vessel and, therefore, does not add to the laser system dimensions. The blower is coupled to the blower motor by a magnetic coupling. Blower speed and power can be changed readily. Corona or cold-cathode X-ray preionization is provided in order to provide arc-free gas discharge. Materials compatible with the laser gases are used in construction. The laser system is configured to be compact, to be easily maintainable, and to be readily adapted for laser industrial processing. Output of the laser system is at least 100 watts at a pulse repetition frequency of 500 Hz with a xenon chloride (XeCl) polyatomic excimer molecule as the laser medium. Other features are also disclosed.
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