| 摘要 |
PURPOSE:To improve the bad condition of growth due to the carry-over of an epitaxial solution by removing the epitaxial solution deposited on a substrate after the epitaxial growth by a centrifugal force by rotating a substrate holder which holds the substrate. CONSTITUTION:After the growth of a substrate 25 brought in contact with an epitaxial solution 21, a substrate holder 23 is moved downward and is separated from a solution reservoir 22. A force of a motor 27a is transmitted by a crystal bar 26a to rotate the holder 23. Then only the epitaxial solution deposited on the substrate 25 is thrown away by a centrifugal force and is contained in a waste-solution reservoir 24. Thus the bad condition of growth due to the carry-over of the epitaxial solution can be improved. |
