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发明名称
摘要
申请公布号	JPS6140132(B2)	申请公布日期	1986.09.08
申请号	JP19790019471	申请日期	1979.02.21
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	KUSAKARI TERUO
分类号	H01L21/677;H01L21/50;H01L21/52;H01L21/58;H01L21/68	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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