| 摘要 |
PURPOSE:To turn an orientation flat of a wafer to a predetermined direction and facilitate prealignment by constructing of two driven rollers and one positioning roller. CONSTITUTION:A left side roller 8 and a right side roller 9 are provided so as to touch an orientation flat 1a of a wafer 1 in the positioning condition. A positioning roller 3', supported by a shaft so as to rotate freely, is provided on the right side of a vertical bisector Y-Y' of the orientation flat 1a of the wafer 1 so as to touch the arch part of the wafer 1. The right side roller 9 is driven clockwise. In the same way, the left side roller 8 is driven clockwise by an endless belt 7''. A means to push the wafer 1' to the direction of an arrow A is provided. |
