发明名称 PLASMA MONITOR APPARATUS
摘要 PURPOSE:To rapidly measure the three-dimensional distribution of the specific chemical seed in plasma, by two-dimensionally irradiating the interior of a plasma utilizing apparatus with laser beam by a laser scanning mechanism consisting of a plurality of prisms and a drive motor. CONSTITUTION:A prism 3 is constituted so as to bend laser beam 2 to a vertical upward direction and a prism 4 makes the laser beam 2 from the prism 3 parallel to the observation window of a plasma utilizing apparatus while a prism 5 is fixed to a prism fixing stand 14 to be arranged to the central part of a stand 10-2 and made movable to the left and right horizontal directions by a drive motor 12 and the laser beam 2 issued from the prism 4 is bent to a horizontal direction by 90 deg. to irradiate the interior of the plasma utilizing apparatus. In order to move laser beam up and down in the vertical direction, a stand moving shaft 13 is rotated by the stand moving motor 11 arranged to a stand 10-1 and the stand 10-2 is moved up and down. By this method, laser beam can be moved two-dimensionally.
申请公布号 JPS61200447(A) 申请公布日期 1986.09.05
申请号 JP19850038708 申请日期 1985.03.01
申请人 HITACHI LTD 发明人 OKAMOTO AKIRA;KOMIYAMA YUZURU;KANEKAWA MASAO;OSADA HISAJIRO
分类号 G01N21/64;H01L21/66 主分类号 G01N21/64
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