| 摘要 |
<p>PURPOSE:To obtain a semiconductive type flow amount detection apparatus capable of accurately detecting a flow amount, by providing a first semiconductor chip having a temp. detection element formed thereto and a second semiconductor chip having a heater element comprising a diffusion resistor, a temp. detection element and a compensation resistor element comprising a diffusion resistor having the same temp. function as the heater element formed thereto. CONSTITUTION:A sensor part 11 consists of a first semiconductor chip 21 wherein a temp. detection element 31 is formed to a silicon substrate and a second semiconductor chip 22 where in a heater element 42, a temp. detection element 41 and a compensation resistor element 43 are formed to a silicon substrate and the compensation resistor element 43 is constituted of a diffusion resistor having the same function to a resistance value as the heater element 42. Four protruded support parts 24 are formed to the notch parts of a substrate 23 and arranged so as to expose the chips 21, 22 to an air stream at said notch parts. By this method, the generation of an error in the measurement of a flow amount due to the temp. characteristics of the diffusion resistor is reduced to a large extent.</p> |
