Method and device for optically determining the distance between a measuring device and selectable points on the surface of a device under test

摘要

In this method, a mark is projected on to the selected point in the form of an annular zone concentrically surrounding the optical axis of the imaging optics. This mark is imaged on the measuring device. The position of this annular zone is determined as a measure of the image width. The imaging optics 0,2, 0,6 are constructed as non-Gaussian optics. <IMAGE>