发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To reduce oxidation in a capillary by mounting a gas inflow tube into the capillary to a joining arm. CONSTITUTION:A small tube 6 for a capillary 4 is fitted into a through-hole 5 at the nose of a horn 3. One end of a gas introducing hole 7 in an arm 2 is coupled with the through-hole 5 and the other end with a delivery tube 8 on the arm 2 side. The hole 7 is communicated with the small tube 6 through a hole 9 in the side wall of the capillary 4 when the capillary 4 is fitted, and a gas is lead out in both the upper and lower directions of the capillary when the gas is introduced. When an Al wire is ultrasonic-bonded under the gas current, the heat of the Al wire is reduced considerably, and a thermal oxidation reaction can be improved. A gas introducing means does not function as the load of vibrations because the inside of arm itself is provided with the means, and the load of vibrations is reduced remarkably because the delivery tube 8 is shaped at the central section of the arm.
申请公布号 JPS61198737(A) 申请公布日期 1986.09.03
申请号 JP19850037490 申请日期 1985.02.28
申请人 TOSHIBA CORP 发明人 ATSUMI KOICHIRO;ANDO TETSUO;IKETANI YUKIHIRO
分类号 H01L21/60 主分类号 H01L21/60
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