| 摘要 |
PURPOSE:To improve control accuracy by detecting the quantity of charge flowing between discharge electrodes. CONSTITUTION:By detecting the integrated amount of the current I3 passing through the discharge space, that is the quantity of charge Qb, the output voltage Va or the output current Ia of the power source 100 is so controlled that the quantity of charge Qb becomes a set value. The quantity of charge Qb is detected from the terminal voltage Vb of the condenser 200 inserted in the passing circuit of the current Ib. Thus, the discharge power can be controlled and kept constant in spite of capacity variation existing in the capacity of the discharge electrodes, wiring, or chamber. |
