| 摘要 |
PURPOSE:To conduct uniform annealing by arranging a plurality of flash lamps on a wafer in a concentric circle manner, disposing temperature sensors to the center and periphery of the wafer and among these center and periphery and separately controlling power to the flash lamps. CONSTITUTION:Halogen lamps 11a, 11b, 11c onto a wafer 12 in a concentric circle manner and temperature sensors 13a, 13b, 13c at predetermined positions are arranged, and connected to a controller 14. Temperatures at the positions of each sensor are set previously to the device 14, the temperatures are compared with signals from several sensor, informations are transmitted over power control sections 15a, 15b, 15c, and the halogen lamps are supplied with required power. The distribution of reference temperatures is obtained beforehand through experiments. According to the constitution, temperature distribution in an annealed wafer surface is equalized, thus preventing crystal defects due to the unevenness of temperature distribution, the dispersion of electric characteristics and warpage. |
